Broadband ultraviolet plasmonic enhanced AlGaN/GaN heterojunction photodetectors with close-packed Al nanoparticle arrays

Plasmonic metallic nanostructures could concentrate optical fields into nanoscale volumes and support efficient light scattering and absorption, which therefore stimulates the continuing development of advanced plasmonic-assisted semiconductor photodetectors. In this work, by fabricating Al nanoparticle (NP) arrays in AlGaN surface using the AAO template transferring method, significant broadband ultraviolet (UV) photoresponse enhancement was demonstrated on AlGaN/GaN heterojunction photodetectors. By deliberately designing the close-packed Al NP arrays, the broadband UV plasmonic resonance with large optical field absorption and strong interface field enhancement are enabled, hence, the highest responsivity exceeding 8.1 A W-1 and maximum external quantum efficiency of 3500% was obtained at the resonance wavelength 292 nm, revealing more than 80 times the excellent enhancement in responsivity. Specifically, owing to coupling among NPs at the Al/AlGaN interface, the smaller size Al NP array exhibits an excellent photoresponse enhancement encompassing the entire UV band compared to the relatively larger size Al NP array. In addition, different photoresponse enhancements depending on the applied bias were observed. The Al NPs detector also demonstrates a fast photoresponse with a rise time of around 60 ms and a relatively long fall time of 1.42 s. This work could be of great significance for gaining a low and efficient approach to achieve plasmonic-empowered heterojunction broadband UV detectors.