A 2-D Tin Disulfide Nanosheet Gas Sensor for Hydrogen Sulfide

This study uses tin disulfide (SnS₂) powder with a MEMS structure to fabricate a micro-sheet (micro-Ss)/MEMS gas sensor. The SnS₂ powder assumes a two-dimensional (2D) nanosheet (nano-Ss) structure after ultrasonic wave grinding to produce a 2D SnS₂-nano-Ss/MEMS gas sensor. The experimental results show that the SnS₂-nano-Ss/MEMS gas sensor has a larger sensor response and lower resistance than micro-Ss/MEMS gas sensors so it is more easily integrated into circuit modules. If the SnS₂-nano-Ss/MEMS H₂S gas sensor operates at 180 ℃, it continues to detect H₂S gas so the sensor is stable and reproducible. It is not sensitive to SO₂, NO, H₂, CO, CO₂, or CH₄ gases, so the SnS₂-nano-Ss/MEMS gas sensor features good selectivity for H₂S gas.