聚二甲基硅氧烷
电容感应
信号(编程语言)
材料科学
压力传感器
灵敏度(控制系统)
压力测量
光电子学
表面压力
流离失所(心理学)
光学
声学
复合材料
电气工程
计算机科学
工程类
电子工程
物理
机械工程
心理学
心理治疗师
程序设计语言
热力学
机械
作者
Eshwar Thouti,A. Nagaraju,Achu Chandran,P.V.B.S.S Prakash,P. Shivanarayanamurthy,Banwari Lal,Prem Kumar,Prateek Kothari,Deepak Panwar
标识
DOI:10.1016/j.sna.2020.112251
摘要
Recently, microstructured PDMS based pressure sensors are explored as a potential candidate in bio-signal monitoring and electronic-skin applications. Here, we have fabricated capacitive pressure sensors with micro-pyramidal PDMS dielectric thin films, and studied the influence of surface coverage and arrangement of these structures on the sensitivity of pressure sensor devices. Pressure sensor with periodically arranged pyramids (surface coverage: 36.7%) exhibited sensitivity of 0.16 kPa-1 in <1 kPa and 0.04 kPa-1 in 0.75-2.5 kPa pressure range, whereas the pressure sensor with diagonally arranged pyramids (surface coverage: 45.2%) exhibited sensitivity of 0.1 kPa-1 in <1 kPa and 0.05 kPa-1 in 0.75-2.5 kPa pressure range respectively. Despite having large surface coverage, pressure sensor with the diagonally arranged pyramids exhibited high sensitivity (0.05 kPa-1) in 1-2.5 kPa pressure range than the periodically arranged pyramids owing to the large displacement and increase in effective permittivity of diagonally arranged pyramids. Simulation studies on the developed pressure sensor structures using Ansys and Opera also confirmed the relatively large displacement and ΔC/Co in diagonally arranged pyramids compared to periodically arranged pyramids having slightly low surface coverage. Experimental results and simulations demonstrate that the sensitivity of these kinds of pressure sensors can also be tuned by arrangement of pyramids. Also, the developed flexible capacitive pressure sensor is demonstrated for in-vivo, real-time pulse wave form recording.
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