Plasma production for material processing and control of plasma parameters.

Weakly ionized plasmas produced by gas discharge are widely used in material processing. Production and control of such plasmas are current interests.In this paper, methods of producing plasma by gas discharge are classified into three groups-electron beam, do diode and ratio frequency (including microwave) -in accordance with the main characteristics of the discharge based on plasma physics. Some comments on various methods of producing plasma and of controlling plasma parameters are also discussed.