Handbook of the moiré fringe technique

云纹 光学 栅栏 干涉测量 空间频率 傅里叶变换 物理 量子力学
作者
Krzysztof Patorski
链接
摘要

Part 1 Theoretical interpretation of formation of Moire fringes: a Fourier series approach to the description of Moire patterns the parametric equation method description of Moire in terms of vectorial sums in Fourier space Moire as an aliasing phenomenon by undersampling. Part 2 Incoherent methods of superimposition of structures: Moire types - additive, subtractice, multiplicative examples of two-structure superimpositions special techniques - use of structures with orthogonal transmittances. Part 3 Coherent methods of superimposition: fringe pattern formation by filtering of the double diffraction orders overlapping real time interference fringes with a recorded pattern. Part 4 Influence of the type of illumination and separation of gratings on the intensity distribution in Moire fringes: the case of coherent illumination, incoherent illumination, partially coherent illumination. Part 5 Moire displacement transducers: basic concepts grating reading heads accuracy of Moire fringe transducers. Part 6 Moire fringe alignment methods: optical alignment by whole-field detection of Moire fringes Moire patterns for three point alignment technique submicron alignment methods for lithography. Part 7 Moire photography: principles implementation fringe pattern recording and processing examples of applications. Part 8 Moire methods in interferometry: in two-beam interferometry in two-beam interferometry with conjugate wavefronts in grating shearing interferometry. Part 9 Shadow Moire topography: principles theoretical description localization and contrast of Moire fringes fringe order determination - absolute, relative instrumental considerations applications. Part 10 Projection Moire topography: principles and basic configurations configurations with a single projection system systems without grating in the observation system double projection Moire topography off-line demodulation methods contrast of Moire fringes absolute and relative fringe ordering instrumental considerations. part 11 Reflection Moire method: Ligtenberg and Rieder-Ritter configurations refleciton Moire arrangements for studying dynamic events specific experiemntal arrangement for studying the flexure of plates. Part 12 Moire as a graphical solution to physical problems: wave physics field physics interpretation of images formed in the field-ion microscope. Part 13 Automatic fringe pattern analysis: intensity methods phase measuring methods - general considerrations, electronic, analytical comparison of automatic fringe pattern analysis methods future trends.

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