Atomic layer deposition of conformal anti-reflective coatings on complex 3D printed micro-optical systems

3D printing of micro-optics has recently become a very powerful fabrication method for sub-millimeter sized optics. Miniature optical systems and entire optical instruments such as endoscopes have become possible with this technique. 3D printed complex micro-optical systems are printed in one single process, rather than being assembled. This precludes anti-reflection coating of the individual lenses before assembly by conventional coating methods such as sputtering or directed plasma etching, as voids between the individual lenses cannot be reached by a directed coating beam. We solve this issue by conformal low-temperature thermal atomic layer deposition (ALD) which is compatible with the low glass transition temperature of the utilized 3D printed polymer materials. Utilizing 4-layer designs, we decrease the broadband reflectivity of coated flat substrates in the visible to below 1%. We characterize and investigate the properties of the coatings based on transmission measurements through coated and uncoated 3D printed test samples as well as through a double-lens imaging system. We find that the reflectivity is significantly reduced and conversely the transmission is enhanced, which is of particular interest for low-light applications. Furthermore, the physical durability and resistance against humidity uptake should also be improved.