Preparation of Ordered Nanohole Arrays with High Aspect Ratios by Anodization of Prepatterned 304 Stainless Steel

A nanohole array structure with a regular array of cylindrical holes of a high aspect ratio with a period of 63 nm can be obtained by anodizing 304 stainless steel with a concave pattern. It was shown that matching the concave period to the anodization voltage is important to achieving the fabrication of nanohole arrays with a high aspect ratio. This is because the interhole distance of anodic porous oxide obtained by the anodization of 304 stainless steel in ethylene glycol containing 0.1 M ammonium fluoride depends on the anodization voltage. By optimizing the fabrication conditions, it was possible to fabricate highly ordered nanohole arrays with aspect ratios exceeding 100. The nanohole arrays obtained in this study are promising as key materials for fabricating various functional devices.