Error correction for Mueller matrix ellipsometry based on a reference optical path

To reduce the error induced by light source fluctuations, motor rotation instability, environment, and other factors in real-time measurements using dual-rotating compensator Mueller matrix ellipsometry (DRC-MME), an error-correction method based on a reference optical path is proposed. A modified Mueller matrix expression was derived theoretically by introducing the reference optical path of the DRC-MME system. Simulation analysis and experimental verification of the air, polarizer, and S i O 2 samples were performed using this method. The absolute error of the Mueller matrix elements of the S i O 2 samples decreased from less than 0.028 to less than 0.008, and the standard deviation decreased from 0.9% to 0.3%. This method has certain guiding significance in improving the measurement accuracy of DRC-MME.