We investigate the structural, electronic, and optical properties of oxygen vacancies (
VO) in crystalline
α, β, and
ε−Ga2O3 using density functional theory (DFT) calculations with the PBE0-TC-LRC functional. Our results reveal that the charge transition levels (CTLs) associated with
VO exhibit significant variations depending on the crystal phase and the coordination environment of surrounding atoms. In particular,
VOs surrounded by tetrahedral Ga atoms (
T-Ga) exhibit deeper CTLs compared to those surrounded by octahedral Ga atoms (
O-Ga). We also observe distinct atomic relaxations, with larger displacements of
T-Ga atoms compared to
O-Ga atoms in the vicinity of
VOs. Using linear-response time-dependent DFT, we investigate the optical transitions of
VO and identify two distinct types of transitions: defect state to conduction band state and valence band to defect state. These results can be used to better understand the optical properties of
VO defects in
Ga2O3 films. Published by the American Physical Society 2024