Humidity Detection by Using a Hybrid Sensor Employing Optical Waveguide Spectroscopy and Quartz Crystal Microbalance

Ridge optical waveguides (OWGs) of fluorinated polyimides were deposited on a quartz crystal microbalance (QCM), and a hybrid sensor employing the OWG spectroscopy and the QCM technique was prepared. A polyvinyl alcohol (PVA) film with CoCl2 was deposited on the OWG, and humidity sensing characteristics were investigated. White light was entered into the waveguide and the output light spectra was observed. The output light intensity markedly changed because of the chromism of CoCl2 by humidity sorption. During the output light measurement, the QCM frequency was monitored simultaneously. The humidity dependences of the QCM frequency and output light were also investigated in a range from 10% to 70%. Furthermore, the response to hydrofluoroether (HFE) was observed, and the change in the output light was hardly observed because CoCl2 does not exhibit chromism in HFE sorption.