Fabrication of Nanochannels with Microfluidic Interface Using PDMS Casting on Ti/Si Nanomold

In this work, the fabrication of nanochannels with microfluidic interface using poly(dimethylsiloxane) (PDMS) casting on Ti/Si nanomold is presented. This new method combines e-beam lithography, Ti metal deposition, photolithography, and casting in PDMS. The combination of nanofabrication with PDMS casting allows the patterning of high-resolution nanostructures while also maintaining high throughput. Additionally, the microfluidic interface simplifies integration with current testing and characterization procedures. This allows the rapid fabrication of nanochannels for basic nanofluidic transport studies, integration with current microfluidic devices, and applications in drug delivery.