This paper reports a high silicon submicron molecular sieve with MFI structure.The molecular sieve preparation process is simple,low-cost and environment friendly.The vapor phase Beckmann rearrangement catalytic effect of MS1 zeolite catalytic cyclohexanone oxime(CHO) to caprolactam has been studied.The influences of vaporization temperature,reaction temperature,CHO concentration and WHSV of CHO on the vapor phase Beckmann rearrangement of CHO were investigated.99.5% of the cyclohexanone oxime conversion rate and 95% of the caprolactam were achieved with better catalyst stability.The results show that MS1 zeolite catalyst has a good potential in industrial application.