Range of keV ions in Mylar films

The damage of Mylar films by the keV ions was analysed with a transmissionenergy. spectrum of 5.5MeV a particles. The experiment showed that the keV ionscan pass through 18.3μm Mylar films. It was thought that the keV ion can sputterinterstitial atoms in the films and produce cavities, so the follow-up ions impingingupon the films have longer range. The maximum range of the ions is associated withthe radiation damage and a linear correlation between the maximum range of theions and the dose is established.