Multispectral imaging in the mid- and long-wavelength infrared using uncooled metamaterial-integrated microbolometer focal plane arrays

Multispectral imaging in the mid-wavelength and long-wavelength infrared using an uncooled imager consisting of microbolometer focal plane arrays (FPA) with plasmonic metamaterial absorbers (PMA) and integrated digital readout circuitry is presented. The FPA features a resolution of 320 × 240 pixels. It is shown that the spectral response of the individual pixels can be tailored to the specific application by adjusting either the geometry or the materials of the PMA. Fraunhofer IMS’ nanotube microbolometers with 17 μm pixel pitch used for this purpose are four times smaller than those used in other works with comparable absorber concepts. The fabrication process is carried out on 200mm CMOS wafers with integrated readout circuitry.