材料科学
薄膜
热电效应
热电材料
退火(玻璃)
溅射沉积
溅射
光电子学
制作
塞贝克系数
弯曲半径
纳米技术
工程物理
复合材料
弯曲
热导率
热力学
物理
工程类
病理
医学
替代医学
作者
Boxuan Hu,Xiao‐Lei Shi,Tianyi Cao,Siqi Liu,Min Zhang,Wanyu Lyu,Liang‐Cao Yin,Tuquabo Tesfamichael,Qingfeng Liu,Zhi‐Gang Chen
出处
期刊:Advanced Science
[Wiley]
日期:2024-10-01
卷期号:11 (44): e2409788-e2409788
被引量:19
标识
DOI:10.1002/advs.202409788
摘要
With the advances in bulk Mg3Bi2, there is increasing interest in pursuing whether Mg3Bi2 can be fabricated into flexible thin films for wearable electronics to expand the practical applications. However, the development of fabrication processes for flexible Mg3Bi2 thin films and the effective enhancement of their thermoelectric performance remain underexplored. Here, magnetron sputtering and ex-situ annealing techniques is used to fabricate flexible Mg3Bi2 thermoelectric thin films with a power factor of up to 1.59 µW cm-1 K-2 at 60 °C, ranking as the top value among all reported n-type Mg3Bi2 thin films. Extensive characterizations show that ex-situ annealing, and optimized sputtering processes allow precise control over film thickness. These techniques ensure high adhesion of the films to various substrates, resulting in excellent flexibility, with <10% performance degradation after 500 bending cycles with a radius of 5 mm. Furthermore, for the first time, flexible thermoelectric devices are fabricated with both p-type and n-type Mg3Bi2 legs, which achieve an output power of 0.17 nW and a power density of 1.67 µW cm-2 at a very low temperature difference of 2.5 °C, highlighting the practical application potential of the device.
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