Review of: "Different methods for obtaining one-dimensional nanoarrays have been mentioned, among them are methods based on lithography (electron beam lithography, optical lithography, electric lithography, ion beam lithography, lithography by scanning microscopes)"
Review of: "Different methods for obtaining one-dimensional nanoarrays have been mentioned, among them are methods based on lithography (electron beam lithography, optical lithography, electric lithography, ion beam lithography, lithography by scanning microscopes)"