X射线光电子能谱
铑
材料科学
铂金
薄膜
氧化物
金属
溅射
分析化学(期刊)
纳米技术
化学工程
催化作用
化学
冶金
工程类
生物化学
色谱法
作者
Yoshio Abe,Kiyohiko Kato,Midori Kawamura,Katsutaka Sasaki
出处
期刊:Surface Science Spectra
[American Vacuum Society]
日期:2001-04-01
卷期号:8 (2): 117-125
被引量:66
摘要
RhO2 belongs to the family of conducting platinum group metal oxides, which have attracted attention as new capacitor electrode materials for dynamic random access memories (DRAMs) and nonvolatile ferroelectric random access memories (FeRAMs). Rh, Rh2O3, and RhO2 thin films were prepared by sputtering and their XPS spectra were collected with a monochromatic Al Kα x-ray source. This report includes XPS spectra of Rh 3d and O 1s core regions for these films.
科研通智能强力驱动
Strongly Powered by AbleSci AI