Optimized Adhesives for Stable Seed Adhesion in High‐Quality SiC Growth via PVT

ABSTRACT The stability of seed adhesion and the choice of adhesive materials significantly influence the quality and size of SiC crystals grown by the Physical Vapor Transport (PVT) method. We investigated two adhesive types of polymer‐based and carbon‐based comprehensively characterizing their physical properties and adhesion stability. X‐ray photoelectron spectroscopy (XPS) and Raman scattering revealed that the polymer‐based adhesive possessed a higher sp 3 bonding fraction (34%) and greater amorphous carbon content (0.75) than the carbon‐based counterpart (19% and 0.52%, respectively). Two‐inch SiC ingots grown using seeds adhered with the polymer‐based adhesive exhibited superior crystallinity, demonstrated by rocking curve full width at half maximum (FWHM) of 27 arcsec and folded transverse optic (FTO) band width of 4.7 cm −1 , compared to 115 arcsec and 5.3 cm −1 for the carbon‐based adhesive samples. In addition, defect densities were reduced by an order of magnitude, as confirmed by molten KOH etching. These findings underscore the critical role of adhesion stability, associated with higher sp 3 bonding and amorphous carbon content, in enabling the growth of high‐quality SiC crystals via the PVT method.