Multimode Hydraulically Amplified Electrostatic Actuators for Wearable Haptics

Abstract The sense of touch is underused in today’s virtual reality systems due to lack of wearable, soft, mm‐scale transducers to generate dynamic mechanical stimulus on the skin. Extremely thin actuators combining both high force and large displacement are a long‐standing challenge in soft actuators. Sub‐mm thick flexible hydraulically amplified electrostatic actuators are reported here, capable of both out‐of‐plane and in‐plane motion, providing normal and shear forces to the user’s fingertip, hand, or arm. Each actuator consists of a fluid‐filled cavity whose shell is made of a metalized polyester boundary and a central elastomer region. When a voltage is applied to the annular electrodes, the fluid is rapidly forced into the stretchable region, forming a raised bump. A 6 mm × 6 mm × 0.8 mm actuator weighs 90 mg, and generates forces of over 300 mN, out‐of‐plane displacements of 500 µm (over 60% strain), and lateral motion of 760 µm. Response time is below 5 ms, for a specific power of 100 W kg−1. In user tests, human subjects distinguished normal and different 2‐axis shear forces with over 80% accuracy. A flexible 5 × 5 array is demonstrated, integrated in a haptic sleeve.