Comparative Study of the Composition and Structure of the Target (ZrSi2–ZrB2–MoSi2)/Cr and Coatings Formed Using Them by the DCMS and HIPIMS Methods

This work is devoted to the production of a ceramic target (ZrSi2–ZrB2–MoSi2)/Cr by hot pressing of products of self-propagating high-temperature synthesis and deposition of coatings in the Zr–Si–Mo–B system by DC magnetron sputtering and high-power pulsed magnetron sputtering. The composition and structure of the initial powder mixtures, SHS products, a two-layer functionally graded target, and coatings deposited during its sputtering have been studied. It is shown that the developed target (ZrSi2–ZrB2–MoSi2)/Cr can be successfully used to obtain coatings with a dense homogeneous defect-free structure, including at high-energy sputtering regimes, peak current of 50 A, and peak power of 50 kW.