The microstructural evolution and densification process of titanium or tin doped indium zinc oxide ceramic targets

Herein, titanium or thin doped indium zinc oxide (IZO) ceramic targets, composed of TiO 2 /SnO 2 , In 2 O 3 and ZnO were prepared. The preparation of composite powders, microstructure evolution, densification and photoelectric properties of these ceramic targets were systematically in detail. The results indicated that doping of SnO 2 was more conducive to the density of IZO targets than the doping of TiO 2 , while they all were beneficial for optimizing electrical performance of IZO ceramic targets due to the solid solution of TiO 2 /SnO 2 in phases, thus the doped IZO ceramic targets had lower resistivity than nondoped IZO targets. In addition, 1wt% SnO 2 doped in IZO ceramic targets performed the best (relative density > 99%, resistivity < 1.1 mΩ·cm, average grain size < 2 µm).