打滑(空气动力学)
压电
惯性参考系
控制理论(社会学)
联轴节(管道)
电压
虚拟力
机械加工
机械
材料科学
平滑度
声学
工程类
物理
经典力学
机械工程
计算机科学
数学
数学分析
控制(管理)
电气工程
人工智能
航空航天工程
作者
Peng Ning,Guangda Qiao,Yuelong Li,Xiaohui Lu,Tinghai Cheng
标识
DOI:10.1177/1045389x221135090
摘要
The piezoelectric stick-slip stage is very important in industrial manufacturing and precision machining. However, due to the stick-slip principle, it is inevitable to produce backward motion, which leads to a decrease in precision and efficiency. A novel smooth-drive scheme for piezoelectric stage is proposed by coupling stick-slip motion and inertial impact in this paper. In the coupling counteract phase, the sliding friction force of stick-slip driving mechanism (SDM) is counteract by the impact force of inertial impact driving mechanism (IDM), thus eliminating the backward motion and realizing the smooth driving of the stage. The feasibility of the stage is analyzed by theoretical calculation and transient dynamics simulation. In addition, the designed stage is fabricated and conducted a complete set of experimental tests. The external dimensions of the stage is 45 mm (L) × 24 mm (W) × 22 mm (H), and the mass is 84 g. Experimental results show that the piezoelectric stage can not only achieve smooth driving, but also actively adjust the output smoothness by adjusting the excitation voltage of PZT I and PZT II. The linear fitting correlation coefficient R 2 of the displacement curve can reach above 0.999, and it still keeps good smoothness at 200 Hz. The maximum vertical mass load of the stage is 4 kg, which is about 47 times the mass of the stage, and the resolution of stick-slip state is about 85 nm. The scheme has positive reference value in the field of stable and accurate positioning.
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