原子层沉积
氮化硼
沉积(地质)
材料科学
图层(电子)
制作
硼
纳米技术
化学工程
陶瓷
氨
氮化物
纳米结构
聚合物
化学
冶金
复合材料
有机化学
工程类
沉积物
替代医学
生物
古生物学
医学
病理
作者
Wenjun Hao,Catherine Marichy,Catherine Journet,Arnaud Brioude
出处
期刊:ChemNanoMat
[Wiley]
日期:2017-08-22
卷期号:3 (9): 656-663
被引量:19
标识
DOI:10.1002/cnma.201700148
摘要
Abstract Due to their high potential in energy and environment domains, synthetic approach allowing fabrication of high quality boron nitride (BN) structures in a controlled manner is of great interest. Herein, a two‐step ammonia‐free atomic layer deposition approach to BN, based on polymer‐derived‐ceramics chemistry, is reported for the first time. Using trichloroborazine and hexamethyldisilazane as precursors, a conformal pre‐ceramic polymer layer is grown at low temperature, 80 °C, and then converted into dense hexagonal BN (h‐BN). The present approach allows conformal and homogeneous deposition of h‐BN films on various substrates with a thickness control at the atomic scale. It proves to be successful for fabricating various tuned BN nanostructures and composites that are efficient in water purification. In particular, the obtained nanostructures demonstrate high hydrophobicity and they are investigated as water filters for organic/water separation. Good separation efficiency is demonstrated that highlights the high potential of such atomic layer deposition (ALD) structures in water treatment.
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