The key effecting factors on deposition rate of titanium were analyzed and concluded.A special process was adopted,halogen and raw titanium was used as raw materials.First,titanium iodides was provided with raw titanium and halogen.Then the high purity titanium was deposited when the titanium iodides was decomposed under right conditions.The main influencing factors on deposition rate of titanium were the current density,the impurity of the raw titanium,the high valent titanium iodides and the vapor pressure of the titanium iodides.