Design and investigation on an ultrasonic-excited piezoelectric gas jet pump

To improve the gas driving performance of the piezoelectric gas driver, this paper proposes a piezoelectric gas jet pump that uses the ultrasonic near sound field of the piezoelectric transducer to excite the gas mass points to oscillate and form a gas jet. The working characteristics of the pump are studied theoretically and experimentally. The distribution law of the sound field excited by the transducer in the sixth-order vibration mode is obtained through simulation analysis. Then the prototypes are designed through calculating the Reynolds number and Stokes number of the gas jet excited by ultrasonic near sound field. And the calculation results show that there is a direct relationship between the gas driving ability of the jet pump and the radiated sound pressure of the transducer. On this basis, the experiments are conducted and the results show that the gas driving performance is significantly affected by the position of the jet hole. When the jet hole is arranged in the central area of the piezoelectric transducer, the gas driving performance of the jet pump is the best. When the driving voltage is 80 Vpp and the driving frequency is 20.4 kHz, the gas flow rate reaches 0.39 L/min.