Integrated Power Supply for MEMS Sensor

The recent expansion of wireless sensor networks and the rapid development of low-power consumption devices and MEMS devices have been driving research on harvester converting ambient energy into electricity to replace batteries that require costly maintenance. Harvesting energy from ambient environment vibration becomes an ideal power supply mode. The power supply module can be integrated with the MEMS sensor. There are many ways to convert ambient energy into electrical energy, such as photocells, thermocouples, vibration, and wind and so on. Among these energy-converting ways, the ambient vibration energy harvesting is more attractive because the vibration is everywhere in our daily environment. Based on the analysis of the basic theory of the electret electrostatic harvester, the basic equations and equivalent analysis model of electret electrostatic harvester are established. The experimental tests for the output performance of electret electrostatic harvester are completed. For the electret material, the material itself can also provide a constant voltage to avoid the use of additional power, which provides an effective way for electrostatic harvesting. Therefore, the electret electrostatic harvesting structure is a kind of ideal energy harvesting method using ambient vibration and can be easily integrated with the MEMS system.