The Effects of RF Power and Cavity Structure on the Plasma Discharge Characteristics of RPS

In this paper, a two-dimensional model of plasma diffusion in remote plasma source discharge chamber is established by COMSOL plasma module. The electron density and electron temperature distributions inside the discharge cavity were obtained by adjusting the thickness of alumina coating and the magnitude of RF power parameters. Based on the results, the authors discuss the effects of different alumina coating thickness and RF power on the electron density and electron temperature inside the discharge cavity, which provide theoretical guidance for the subsequent optimization of the internal structure of the discharge cavity and the discharge parameters.