10 ps timing with highly irradiated 3D trench silicon pixel sensors

Abstract In this paper the results of a beam test characterization campaign of 3D trench silicon pixel sensors are presented. A time resolution in the order of 10 ps was measured both for non-irradiated and irradiated sensors up to a fluence of 2.5 × 10 16 1 MeV n eq cm −2 . This feature and a detection efficiency close to 99% make this sensors one of the best candidates for 4D tracking detectors in High-Energy-Physics experiments.