Monte Carlo modelling of electron-solid interactions

First, Monte Carlo modelling of electron-solid interactions is briefly reviewed regarding its historical development, followed by quantification in microbeam analysis with various types of signals generated by electron penetration in solids. Second, typical models stimulated by these improvements are explained by demonstrating some of the Monte Carlo calculations which are, the authors believe, still of practical interest and use. Then, a typical calculation procedure for Monte Carlo simulation is described in detail from the standpoint of a physicist who does his or her own programming. Third, up-to-date Monte Carlo calculations as applied to modern surface analysis, high-resolution scanning electron microscopy, Auger electron microscopy and X-ray photoelectron spectroscopy are also presented.