Functionalized disiloxane units with defined structures are interesting molecular models for investigating the reactivity and chemoselectivity in transformations that are of interest in synthesis, surface chemistry, and materials science. (Mes)PhSi(OMe) 2 ( 1 ) (Mes = mesityl) and (Mes)PhSiCl 2 ( 5 ) were chosen as starting compounds for the controlled synthesis of methoxy‐, amino‐, and chloro‐functionalized unsymmetric disiloxanes. Two synthesis routes towards (Mes)PhSi(OMe)(OSiPh 3 ) ( 3 ) were followed, one via the aminomethoxysilane (Mes)PhSi(OMe)(NC 4 H 8 ) ( 2 ) and the other via the chlorodisiloxane (Mes)PhSiCl(OSiPh 3 ) ( 6 ). The amino‐substituted disiloxane (Mes)PhSi(NC 4 H 8 )(OSiPh 3 ) ( 4 ) was obtained from the chloro derivative 6 with N ‐pyrrolidinyllithium, but the same reaction starting from compound 3 was not successful. All provided disiloxanes were structurally characterized by X‐ray crystallography.