UHV ENFINA - A New High-Performance EELS Spectrometer for the VG STEM

The Gatan Enfina EELS spectrometer, featuring a new generation of detection system, was recently developed to upgrade or replace Gatan PEELS / DigiPEELS systems. Major advantages of the system include significant improvements to the detector point spread function, readout speed, sensitivity, readout noise, and increased number of detection channels. This design was until now not available for VG STEM systems because compatible detectors must not significantly degrade the UHV column vacuum and must survive column baking. in this abstract we report on a new detector system with comparable specifications to the standard Enfina system but designed for new or for upgrading existing Gatan UHV PEELS / DigiPEELS systems on the VG STEM. The standard Enfina design has the scintillator, fibers, CCD, CCD socket board, flex-cables, thermo electric cooler and coupling grease in the shared vacuum of the EELS spectrometer and the electron microscope.