First, based on a dynamic model of surface grinding processes, the generation and development of surface grinding chatter are analyzed. Then, the experimental scheme of grinding chatter in surface grinding process is designed. The experimental results of grinding chatter and ground surface waviness on the precise surface grinding machine are obtained. The influences on grinding chatter and ground surface waviness under the diverse grinding conditions are investigated, and it corresponds with theoretical analysis. Finally, the relationship between grinding chatter and ground surface waviness is presented. The results show that cutting depth is the leading factor in grinding chatter and ground surface waviness in surface grinding process, and there is an obvious increasing tendency of chatter amplitude and surface waviness amplitude with the increase of workpiece speed under the condition of large cutting depth.