微波食品加热
等离子体
波导管
联轴节(管道)
物理
离子源
瞬态(计算机编程)
计算物理学
材料科学
原子物理学
光学
计算机科学
量子力学
冶金
操作系统
作者
Wencong Zhang,Li Wu,Junwu Tao,Huacheng Zhu
出处
期刊:Physical review
日期:2023-12-21
卷期号:108 (6)
被引量:1
标识
DOI:10.1103/physreve.108.065209
摘要
This paper proposes a transient three-dimensional model to simulate microwave-induced discharges in a waveguide-based plasma source under intermediate pressures. A plane-symmetric simplification method is applied to simplify half of the microwave plasma source in the calculation domain, dramatically reducing the demand for computational resources and calculation time. Meanwhile, the numerical simulations remain in three dimensions without dimensionality reduction, which allows us to directly calculate the efficiency of power coupling from the incident microwave to the plasma. Besides, the computation decrease improves the convergence performance of the mathematical model, making it possible to model the entire discharge process from $1\ifmmode\times\else\texttimes\fi{}{10}^{\ensuremath{-}9}$ to $1\ifmmode\times\else\texttimes\fi{}{10}^{4}\phantom{\rule{4pt}{0ex}}\mathrm{s}$. This period covers the instantaneous microwave breakdown to the formation of a stable plasma column near steady state. The results have revealed the electromagnetic waveguide structure change of the microwave plasma source during the discharge process. Several microwave power-coupling efficiencies of the waveguide-based plasma source with different thicknesses and permittivities of the glass tube are calculated and compared with the experimentally measured data. Furthermore, the effects of the glass tube on the electromagnetic modes of the traveling microwave propagating along the plasma column and the discharge properties are also investigated. The numerically obtained results generally agree with the theoretical analysis and the experimental data in our previous studies, demonstrating the validity of the proposed mathematical model and the plane-symmetric simplification method.
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