心轴
机械加工
材料科学
磨料
光学
机械工程
复合材料
物理
冶金
工程类
作者
Satoru Egawa,Yusuke Matsuzawa,Kentaro Hiraguri,Hiroto Motoyama,Gota Yamaguchi,Shunya Yokomae,Yoshinori Takei,Takehiro Kume,Shigeki Owada,Kensuke Tono,Makina Yabashi,Hirokazu Hashizume,Hidekazu Mimura
摘要
In this study, figure correction of a master mandrel of a Wolter mirror by organic abrasive machining (OAM) was demonstrated. In OAM, a flow of slurry, dispersed with organic particles, locally removes the surface of a workpiece in contact with a rotating machining tool. A computer-controlled machining system was used to perform the selective removal of a fused silica surface at a spatial resolution of 200 µm. A master mandrel of a Wolter mirror for soft x-ray microscopes was fabricated with a figure accuracy of <1 nm root mean square, which is sufficient for diffraction-limited imaging at a wavelength of 10 nm.
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