Past and Future of Micro-/Nano-electronics

Electronics started at the beginning of the last century and evolved to micro-/nano-electronics. Miniaturization of the electron devices dramatically improved the performance, reliability, cost, energy consumption, volume, and weight with the order of billions to trillions times. Without the micro-/nano-electronics, today's intelligent society with internet and artificial intelligence cannot not exist. However, the miniaturization is now facing its limit. In this paper, the past and future of micro-/nano-electronics are described.