Laser micromachining of pyrex and quartz glass using femtosecond-lasers

The results of our investigations on femtosecond-laser micromachining of Pyrex and quartz glass are presented. The investigations were done using a micromachining station from the 3D-Micromac AG Chemnitz into which a Clark MXR fs-laser CPA 2010 (775 nm mean wavelength, 130 fs pulse duration) is implemented. It is shown how the parameters of the microstructures produced in the materials depend on the processing parameters. By drilling the pyrex glass in vacuum, an increase of the average removal rate per laser pulse by the factor of 2.3 was achieved compared to the drilling under normal conditions but otherwise unchanged parameters. The formation of cracks in the vicinity of the holes or on the walls due to the laser machining was not observed, neither with Pyrex nor with quartz glass. There may occur, however, chunkings on the side of the laser beam exit of through holes.