We report on distribution of Eu ions doped CaF2single crystal by measurement of multi-photon luminescence. Distribution of Eu2+and Eu3+ions is measured respectively because the luminescence peak due to Eu2+and Eu3+ions is different. We observed the difference in distribution of Eu2+and Eu3+ions doped CaF2which is grown by Annealing method and micro pulling-down method.