Thickness of ruthenium oxide film produced by the surface deactivation treatment of ruthenium-plated contact reed switches

A precise analysis of ruthenium-plated contact surfaces was made to obtain information on the thickness of ruthenium oxide film. The thickness of ruthenium oxide film before and after high-temperature oxygen treatment was measured. As a result of investigation using ellipsometry and Auger electron spectroscopy, it was found that the thickness of ruthenium oxide film on the ruthenium-plated contact surface treated with oxygen at 450 degrees C optimum treatment temperature is approximately 50 AA and that the thickness increases as treatment temperature rises.>