球栅阵列
沉积(地质)
材料科学
冶金
纳米技术
地质学
沉积物
焊接
古生物学
作者
Peng Li,Junyi Yu,Suibin Luo,Zhiqiang Lai,Bin Xiao,Shuhui Yu,Rong Sun
出处
期刊:Zhongguo kexue
[Science China Press]
日期:2023-09-12
卷期号:53 (10): 1866-1879
被引量:3
标识
DOI:10.1360/ssc-2023-0130
摘要
In recent years, technologies concerning flip chip ball grid array (FC-BGA) substrates with the circuitry of narrow line/space have witnessed significant developments, which are fabricated on build-up films (BFs) via the semi-additive process (SAP). A variety of factors including microstructures, physical and chemical features of build-up films, copper deposition parameters and relevant chemical bath compositions collectively determine the resolution and bonding strength of fabricated circuitry and ultimately affect the quality and reliability of packaging substrates, which makes it meaningful to study and reveal the relevance of these factors. Based on the fabrication technologies of copper interconnects in build-up film substrates towards FC-BGA, this review puts emphasis on the discussion of copper plating bath compositions in the semi-additive process on build-up films, and outlooks possible future prospects of further increasing the quality of circuitry, in accordance with some key evaluation factors of deposited copper.
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