光学
补偿(心理学)
镜头(地质)
热的
球差
材料科学
计算机科学
物理
心理学
气象学
精神分析
作者
Xinfeng Yu,Huaijiang Yang,Mingyang Ni
出处
期刊:Applied Optics
[Optica Publishing Group]
日期:2022-09-14
卷期号:61 (29): 8624-8624
被引量:3
摘要
Thermal aberrations caused by absorption of laser beams degrade the image quality of exposure tools during the working process. Many compensators, such as lens movement or lens deformation, are used to compensate for low-order thermal aberrations of optical systems. In this paper, an apparatus with higher-order aberration correction capability is presented. The main principle of the apparatus is to actively heat and cool the lens near the pupil to generate a desired temperature profile to compensate for thermal aberrations. We first introduce the basic concept of the apparatus. Then we establish an analytical model to describe the lens temperature of the apparatus based on its working principle and demonstrate its compensation capability. Finally, an algorithm for dynamic thermal aberrations compensation is proposed to overcome the time lag effects of a thermally controlled lens.
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