试验台
计算机科学
半导体器件制造
集合(抽象数据类型)
体积热力学
工程类
系统工程
计算机网络
电气工程
程序设计语言
薄脆饼
物理
量子力学
作者
Denny Kopp,Michael Hassoun,Adar Kalir,Lars Mönch
标识
DOI:10.1109/tsm.2020.3001933
摘要
We present a new set of simulation models, organized in a testbed. The aim of the testbed consists in providing researchers with a platform able to credibly represent the complexity of modern semiconductor manufacturing. The testbed is open to public use, and include so far four models. A high-volume/low-mix model and a low-volume/high-mix model constitutes the foundation of the testbed. Two additional models incorporate the complexity of engineering lots. We conclude this paper by presenting a case study that demonstrates that the third and fourth model can be used to assess the performance of integrated dispatching strategies for production and engineering lots.
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