材料科学
微加工
光引发剂
制作
光刻
光刻胶
生物相容性
光掩模
纳米技术
激光器
平版印刷术
微电子机械系统
激光扫描
微透镜
软光刻
聚合
快速成型
光电子学
激光加工
PDMS印章
无光罩微影
微流控
智能材料
聚合物
执行机构
聚二甲基硅氧烷
微技术
软机器人
3D打印
精密工程
铸造
作者
Qingbo Jiao,Yimin Zhang,Wenbo Wang,Ge Jiang,Wei Wang,Mengdan Qian
出处
期刊:
[Figshare (United Kingdom)]
日期:2025-12-24
标识
DOI:10.6084/m9.figshare.c.8130941
摘要
This study addresses the three-dimensional (3D) fabrication of PDMS for intelligent micromechanical systems through a novel PDMS-based photoresist compatible with two-photon polymerization (TPP). By optimizing a two-component photoinitiator system, photosensitivity and processability were significantly enhanced, enabling complex 3D structures with sub-micron precision. Using programmable TPP direct laser writing and by controlling the processing parameters and scanning strategies, we established a quantitative model for structural fidelity and achieved spatial control over the crosslinking density.Thus, solvent-responsive components used for encrypted micropillar arrays and smart microvalves were successfully fabricated, demonstrating the precise and controllable deformation upon solvent stimulation. Excellent cytocompatibility is also confirmed by biocompatibility tests. This research breaks through conventional PDMS microfabrication limitations, providing innovative material solutions and processing pathways for intelligent micro-systems in microfluidics, soft robotics, and biomedical fields.
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