The Fabrication of Bio-Inspired Chemical Vapor Sensors via Plasma Enhanced Chemical Vapor Deposition
作者
Jesse Enlow,Daniel M. Gallagher,Hao Jiang,Lawrence L. Brott,Rachel Jakubiak,Rajesh R. Naik,Timothy J. Bunning
出处
期刊：日期：2010-01-01卷期号：: TuD11-TuD11
标识
DOI：10.1364/oic.2010.tud11
摘要
Plasma enhanced chemical vapor deposition (PECVD) of biologically active films is investigated for the fabrication of bio-inspired chemical vapor sensors, due to the ability to fabricate thin films with unique surface chemistries.
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(2025-6-4)
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