Semi-analytic modeling and experiments of a collapse-mode CMUT with fluid coupling

Semi-analytic, reduced-order model of a fluid-loaded transmitting capacitive-micromachined ultrasound transducer (CMUT) operated in collapse mode is developed. A prototype of this CMUT has been used in an intracardiac catheter fabricated CMUT. The model accurately predicts the static response behavior. In addition, the dynamic responses of a detached single CMUT cell and an array of CMUT cells are analyzed for the effect of pressure radiation. Experiments shows that the dynamic response and frequency-tunability of the CMUT array are modeled with satisfactory accuracy. The model is thus a powerful tool for CMUT pre-design.