Cooperation Method of Symmetrically Distributed Multi-Nanorobotic Manipulators Inside SEM for Nanodevice Constructing

This paper presented a series of cooperation strategies of symmetrically distributed multi-nanorobotic manipulators according to different tasks during nanodevice fabrication inside scanning electron microscopy (SEM). For constructing carbon nanotube (CNT) based nanodevice such as carbon nanotube field effect transistor (CNTFET), the mainly assembly processes implemented by different nanorobotic manipulators were discussed. Manipulation strategies for each task during assembly were established based on nanorobotic manipulation system. Experiments were designed and carried out to evaluate the effectiveness of different manipulation strategies designed for multi-task. The results shown that the designed manipulation strategies was adapted for the nanorobotic manipulation system during CNT based nanodevice assembly.