Research on adjustment of the electrical resistivity of Aluminum Nitride ceramic

Rahbek electrostatic chucks (J-R ESC) with a surface layer with lower resistivity could produce a bigger clamping force under low applied voltage and has been widely studied and used. In this paper., the adjustment of resistivity of aluminum nitride ceramic has been studied. Taking $\mathbf{Y}_{2} \mathbf{O}_{3}$ and TiN as the modifier., two groups experiment., group A and B, among which group A takes 2wt. % 6wt. % $\mathbf{Y}_{2} \mathbf{O}_{3}$ as additives while group B with 2wt. %6wt. % $\mathbf{MoSi}_{2}$ and 2% $\mathbf{Y}_{2}\mathbf{O}_{3}$ as additives. After ball-milling and tape casting, they were kept d at $\mathbf{1800^{\circ} \mathrm{C} 2 \sim 5 h}$ to acquire a sintered sample with a diameter of 50mm and a thickness of 1mm by SPS method. The result of the resistivity measurement showed that the resistivity of the two samples in group A had a small decrease, while the samples in group B decreased drastically to the degree of $\mathbf{10^{10}\Omega\cdot \text{cm}}$ .