笛卡尔坐标系
长椭球坐标
半导体
光学
对称(几何)
圆柱坐标系
物理
经典力学
材料科学
几何学
机械
光电子学
广义坐标
数学
出处
期刊:Journal of vacuum science & technology
[American Institute of Physics]
日期:2003-09-01
卷期号:21 (5): 2080-2088
被引量:135
摘要
The electrostatic potential resulting from a metallic probe tip near a semiconductor is examined. A solution is formulated assuming circular symmetry and using prolate spheroidal coordinates in the vacuum and Cartesian coordinates in the semiconductor. The result is most directly applied to the case of a hyperbolic probe tip, but other shapes (for example, a small hemispherical protrusion on the tip apex) can also be handled. Numerical results are given for representative cases that might be encountered in scanning probe microscopy.
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