Simultaneous mass-detection of two sorts of analyte with a single resonant micro-cantilever

Mass-loading detection of two sorts of analyte with a single resonant micro-cantilever is proposed and experimentally validated. By exciting the cantilever in different resonance modes and adsorbing the different analytes at different locations of the cantilever, the specific mass of either sort of analyte can be independently detected. The proposed micromechanical resonant cantilever sensor is designed and fabricated using silicon micromachining techniques. Used as simulant adsorbates, Au and Cr thin-films are selectively implemented on the cantilever to verify the bi-analyte detecting function.