表面微加工
机械加工
光学
激光器
材料科学
计量系统
激光加工
飞秒
激光束
物理
制作
医学
替代医学
病理
天文
冶金
作者
Shihan Xu,Yinhui Yu,Zhen‐Nan Tian,Lei Wang,Aiwu Li,Qi‐Dai Chen
摘要
In this study, a three-dimensional (3D) laser micromachining system with an integrated sub-100 nm resolution in-situ measurement system was proposed. The system used the same femtosecond laser source for in-situ measurement and machining, avoiding errors between the measurement and the machining positions. It could measure the profile of surfaces with an inclination angle of less than 10°, and the measurement resolution was greater than 100 nm. Consequently, the precise and stable movement of the laser focus could be controlled, enabling highly stable 3D micromachining. The results showed that needed patterns could be machined on continuous surfaces using the proposed system. The proposed machining system is of great significance for broadening the application scenarios of laser machining.
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