Purification of octafluoropropane from hexafluoropropylene /octafluoropropane mixtures with a metal-organic framework exhibiting high productivity

Octafluoropropane (C3F8) electronic specialty gas is widely used in the process of etching and cleaning in semiconductor manufacturing industry. Removal of hexafluoropropylene (C3F6) impurities from C3F6/C3F8 mixtures thus is highly...